Design and control of a single-chip SOI-MEMS atomic force microscope
- Creator: Maroufi, Mohammad , Ruppert, Michael G. , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2017
Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner
- Creator: Maroufi, M. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2013
Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor
- Creator: Piriyanont, Busara , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator: Fowler, A. G. , Laskovski, A. N. , Hammond, A. C. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A low-loss MEMS tunable capacitor with movable dielectric
- Creator: Zhu, Y. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2009